semiconductor+ultraviolet

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http://www.extremenano.com/article/researchers+could+eliminate+furnaces+from+chipmaking/182205_1.aspx?kc=xbrss05059tx1k0000797

Researchers Could Eliminate Furnaces From Chipmaking

Using ultraviolet light would be far more energy-efficient, say UCL boffins.

technology silicon baking light process chip oven etching wafer manufacture semiconductor ultraviolet

>30 days ago by PaulRaven, 1 User, more info save

semiconductor+ultraviolet

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